Dahe Thermomagnetic latest high-end precision electron beam coating machine will be unveiled at the high-tech LED exhibition

"Terrotec's US subsidiary Temescal has more than 60 years of manufacturing technology and experience in electron guns and coating machines, occupying more than 50% of the US semiconductor and communications industry." Hangzhou Dahe Thermomagnetic Electronics Co., Ltd. (hereinafter referred to as "Dahe Thermomagnetic") Yang Donghong of the Vacuum Technology Division was both excited and helpless in an interview with the reporter of "High-tech LED". Due to the continued downturn in the global economy, it has affected the semiconductor and communications industries, although the first half of the year. The overall sales of thermal magnets have maintained a certain increase, but the growth rate has slowed slightly compared with previous years.

At the upcoming 2012 High Tech LED Show, Daiwa Thermomagnetic will launch its newly developed high-end precision electron beam evaporation coating machine TFC3500 for the first time. “This is specially developed for the LED manufacturing industry and other industrial fields. With the 60 years of history and experience of Ferrotec Temescal in the United States, and a number of patented technologies in the manufacture of electron guns and coating machines, it has absorbed the United States, Germany, Yang Donghong said that Japan and other new technologies at home and abroad.

According to the person in charge of Daiwa Thermomagnetic, TFC3500 uses the world's widely used electron gun (Temescal), high-voltage power supply (Ferrotec Germany), cryogenic pump (CTI) and imported dry pump, vacuum gauge, crystal film thickness controller, electron beam Scanners, gate valves, magnetic fluid sealed bearings, electronic circuit components, etc. The eggshell type stainless steel main cavity effectively shortens the exhaust time while ensuring a large amount of loading. The slidable electrical cabinet and the hoistable and lowered electron gun chassis reduce the occupied space and are convenient to use and maintain. The overall structure is compact, energy-saving and the floor space is small.

At the same time, in the information age, TFC3500 can carry out safe and reliable automatic control and data recording of complex coating process through computer software and operating system. At the same time, it is equipped with high-temperature infrared heaters for substrate industry, reactive gas flow controllers, controllable cryopump gate valves, and so on.

Yang Donghong pointed out that unlike the traditional coating machine structure design, the vacuum chamber and evaporation distance of the TFC3500 can be lengthened according to the user's needs to meet the coating requirements on a 6-inch or larger substrate. It is suitable for 50mm~150mm wafer ITO film. Process.

In the first half of this year, the world is facing a severe economic fatigue test, especially in emerging industries. However, Yang Donghong believes: "The LED industry, as an emerging industry that encourages development and support in the country, will still have more dynamic enterprises in the second half of the year, and will invest in new production lines to promote expansion projects. It is expected that the overall sales situation of the company this year will not be as expected. So pessimistic."

Speaking of future development, Yang Donghong said that Ferrotec (China) will focus on reducing production costs, increasing supply, and continue to develop high-tech coating machines with international standards and suitable for the Chinese market. In order to better meet and adapt to the development needs of China's future LED industry.

After 20 years of rapid development, Ferrotec (China) employees range from 9 to 5,000 people, with a plant area ranging from 500 square meters to 236,000 square meters, with a total investment of 150 million yen to 20 billion yen, and sales from the original 380,000 yuan. 45 billion yuan. It has developed into a diversified enterprise group integrating R&D, manufacturing and service, and a multinational group with diversified technologies, centered on three main businesses led by semiconductor, solar energy and functional materials. And in the semiconductor, solar photovoltaic, precision machinery high-end field has established a good image of the industry.

2012 High-tech LED Exhibition Exhibition Address: Guangzhou Poly World Trade Center Expo Booth No.: 2C01
Exhibition date: August 17-19, 2012

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